近日，曼恩斯特首套显示面板智能旋涂系统顺利交付显示行业某头部客户，其中包括旋涂设备、平板涂布设备、EBR 清边设备、VCD 及配套装备。此次交付，不仅标志着公司在显示面板精密涂布装备领域的技术实力再获行业头部客户认可，也进一步完善了曼恩斯特在泛半导体高端装备领域的产品布局。

针对显示面板行业研发阶段材料体系多样、工艺窗口验证频繁、薄膜一致性要求高等需求，曼恩斯特依托多年精密涂布技术积累，打造旋涂与 EBR 清边协同解决方案，为新型显示面板工艺开发提供可靠装备支撑。

作为本次交付的核心装备之一，旋涂设备主要面向显示面板及半导体研发应用，支持不同类型光刻胶涂覆，满足工艺开发与验证需求。

设备采用高精度闭环伺服运动控制，片内、片间均匀性均 ≤2%，支持 0.5–50 μm 宽膜厚范围，兼容光刻胶及多种工艺药液，满足超薄膜至厚膜开发需求，支持手动、半自动及全自动运行模式，显著提升研发效率与灵活性。

针对 0–3000 cP 不同粘度药液，配备多喷嘴自动切换系统，实现材料快速切换；供液罐至输送管路全过程闭环恒温控制，温控稳定性达±0.2℃，有效保持药液粘度稳定，提升涂布一致性与重复性。

同步交付的 EBR 清边设备，清边宽度 2~3 mm、精度±0.3 mm，可有效减少边缘堆积，为后续曝光、贴合等工艺提供更优基片条件。

支持多组工艺配方管理与快速调用，满足不同材料体系及工艺窗口验证；关键工艺参数实时监测，全过程数据记录与追溯，兼容 OPC 协议，支持与 MES 系统及上下游设备互联互通，为工艺优化与智能制造提供支撑。

此次同步交付的平板涂布设备及 VCD 设备已在多家头部客户稳定应用，产品性能及工艺可靠性经多个项目验证，可与旋涂设备协同实现研发关键工艺的高效验证，进一步提升研发平台整体运行效率。

从项目启动到交付，曼恩斯特项目团队始终以客户需求为导向，协同推进工艺适配、设备集成、安装调试及技术培训。

针对研发设备对工艺稳定性、材料兼容性及数据管理的要求，团队持续优化方案，完成多轮工艺验证与性能测试，为客户后续工艺开发提供有力保障。

依托多年精密涂布技术积累，曼恩斯特持续完善产品矩阵，围绕钙钛矿太阳能、半导体板级封装、显示面板等泛半导体领域，构建覆盖实验研发、中试验证及规模化量产的全流程涂布技术解决方案。目前，相关涂布装备已完成多个项目交付验证。

未来，曼恩斯特将继续坚持自主创新，完善精密涂布装备体系，以更稳定、高效、智能的解决方案，助力全球泛半导体产业高质量发展。

01 Three Core Advantages for Advanced Process Development

As one of the core systems delivered in this project, the Spin Coater is designed for display panel and semiconductor R&D applications, supporting a wide range of photoresists for efficient process development and validation.

High-Precision Coating with Broad Material Compatibility

Equipped with a high-precision closed-loop servo motion control system, the Spin Coater achieves within-substrate and substrate-to-substrate uniformity of ≤2% while supporting coating thicknesses from 0.5 to 50 μm. Compatible with photoresists and a wide range of process chemicals, the system enables process development from ultra-thin to thick-film applications. Manual, semi-automatic, and fully automatic operating modes provide greater flexibility and significantly improve R&D efficiency.

Precise Fluid Control for Stable Process Performance

To accommodate process chemicals with viscosities ranging from 0 to 3000 cP, the system features an automatic multi-nozzle switching mechanism for rapid material changeover. A closed-loop temperature control system extends from the supply tank through the fluid delivery lines, maintaining temperature stability within ±0.2°C to ensure consistent fluid properties, improve coating uniformity, and enhance process repeatability.

The accompanying EBR System provides an edge bead removal width of 2–3 mm with an accuracy of ±0.3 mm, effectively minimizing edge bead buildup and delivering cleaner substrate edges for subsequent lithography, bonding, and other downstream processes.

Intelligent Process Management for Digital R&D

The platform supports the management and rapid recall of multiple process recipes, enabling efficient validation across different material systems and process windows. Critical process parameters are monitored in real time, with complete data logging and traceability throughout the entire process. Compatible with the OPC protocol, the system also supports connectivity with MES and upstream/downstream equipment, providing a robust digital foundation for process optimization and smart manufacturing.

The flatbed coating equipment and VCD equipment delivered alongside have been reliably deployed at multiple leading customers, with their performance and process reliability validated across numerous projects. They can work in coordination with the spin coating equipment to enable efficient validation of critical R&D processes, further enhancing the overall operational efficiency of the R&D platform.

02 Professional Project Delivery for Faster R&D Deployment

From project initiation through final delivery, the MANST project team remained customer-focused, working closely with the customer on process adaptation, equipment integration, installation, commissioning, and technical training.

To meet the stringent requirements for process stability, material compatibility, and data management in display R&D, the team continuously optimized the equipment solution and completed multiple rounds of process validation and performance testing, providing reliable support for the customer's subsequent process development.

03 End-to-End Equipment Capabilities for Industrial Scale-Up

Building on years of expertise in precision coating technologies, MANST continues to expand its product portfolio across applications including perovskite solar cells, semiconductor panel-level packaging, and display manufacturing. The company has established a comprehensive precision coating solution covering laboratory R&D, pilot-scale validation, and high-volume manufacturing, with multiple successful project deliveries completed across different application scenarios.

Looking ahead, MANST will continue to drive innovation in precision coating technologies and further strengthen its precision coating equipment portfolio. By delivering more stable, efficient, and intelligent solutions, MANST remains committed to supporting the sustainable development of the global display and pan-semiconductor industries.

编辑 | 阿聪

审核 | 魏小姐